微機電系統(tǒng)是在微電子技術(shù)基礎(chǔ)上產(chǎn)生和發(fā)展起來的多學科交叉的前沿科學研究領(lǐng)域,是面向21 世紀的高新科技. 介紹了微機電系統(tǒng)產(chǎn)生的背景影響、組成特征和基礎(chǔ)研究內(nèi)容,綜述了微機電系統(tǒng)技術(shù)基礎(chǔ)所涉及的材料、微機械設(shè)計和模、微細加工技術(shù)以及微封裝與測試等領(lǐng)域,并對微機電系統(tǒng)的應用、典型的微器件、國內(nèi)外的發(fā)展現(xiàn)狀及前景進行全面分析. 在此基礎(chǔ)上,論述了MEMS 技術(shù)目前存在的問題和未來發(fā)展的趨勢.
關(guān)鍵詞: 微機電系統(tǒng); 基礎(chǔ)研究; 微加工技術(shù);微型傳感器;現(xiàn)狀及展望

Abstract : Micro2Electro2Mechanical System(MEMS) developes on the basis of microelectronics. It is a scien2 tific researches frontier of multi2disciplines and a high technology in the 21st century. This paper presents the background ,characteristics and basic research. The principal techniques of MEMS such as material ,design and simulation ,micromachining ,packaging and testing are reviewed ,Typic microapparatus ,application prospect and the state2of2art of MEMS are also discussed in this paper . Furthermore ,some points of view of developing on MEMS in the future are put forward.
Keywords : micro2electro2mechanical system; basic research ; micromachining ; microsensor ; state2of art and
prospect