半導(dǎo)體激光吸收光譜氣體濃度分析儀器可現(xiàn)場在線分析工業(yè)過程氣體濃度，具有無需采樣預(yù)處理、響應(yīng)速度快、不受背景氣體和粉塵影響以及惡劣工業(yè)環(huán)境適應(yīng)能力強等突出優(yōu)勢。在介紹調(diào)制吸收光譜基本原理的基礎(chǔ)上詳細介紹了儀器的性能特點和組成結(jié)構(gòu)。實驗顯示該儀器具有小于±１％的線性誤差和長時間穩(wěn)定性?，F(xiàn)場應(yīng)用證實了該儀器優(yōu)越的工業(yè)環(huán)境適應(yīng)性和高可靠性。

An in situ gas concentration analyzer based on diode-laser absorption spectroscopy (DLAS) has been developed for gas sensing in industrial processes with fast time response, immunity to background gas and dust, and exceptional harsh-environment suitability. After introducing the principle of modulation spectroscopy, this paper describes the features and configuration of the analyzer. Laboratory and field experiments demonstrate that the analyzer has less than 1% linearity and long-term stability, and high reliability even in industrial environment.