簡(jiǎn)要介紹了位置敏感傳感器（position sensitive detector，簡(jiǎn)稱PSD）的基本原理和特點(diǎn)。以PSD 作為檢測(cè)部件，基于機(jī)械振動(dòng)理論、控制理論和光電位移檢測(cè)技術(shù)，提出了一種雙層主動(dòng)隔振系統(tǒng)，建立了系統(tǒng)數(shù)學(xué)模型并給出了仿真結(jié)果。研究表明，PSD 的引入有效避免了傳統(tǒng)加速度傳感器所帶來(lái)的積分問(wèn)題，提高了系統(tǒng)實(shí)時(shí)性，從而大大提高了隔振率。
關(guān)鍵詞雙層主動(dòng)隔振系統(tǒng)位置敏感傳感器
Abstract The basic principle and characteristics of position sensing detector（PSD）are described. A two-layer active vibration isolation system on the
basis of mechanical vibration theory，control theory and photoelectric displacement detection technique is presented in the article. In this system PSD is
adopted as the detective component. System mathematical model is established and simulation result is given. Study suggests that the introduction of PSD
effectively avoids integration problem brought by traditional accelerometer，greatly improves the real time capability thus highly enhances the efficiency of
vibration isolation.
Key words Two-layer active vibration isolation system Position Sensing detector（PSD）